Federal Awards · Award

ELECTRON BEAM LITHOGRAPHER (EBL), USED TO DEFINE NANO-SIZED GEOMETRIC STRUCTURES NEEDED IN THE FABRICATION…

Award details are derived from public USAspending.gov records. Not a bid recommendation.

Award details

Award ID
80GSFC22PA009
Contractor
Sub-agency / office
National Aeronautics and Space Administration
Award amount
$1,947,910
Period of performance
Jun 29, 2022 – Apr 28, 2023
NAICS
333242 — Semiconductor Machinery Manufacturing
PSC
PSC 3670
Place of performance
MD

Public award description

ELECTRON BEAM LITHOGRAPHER (EBL), USED TO DEFINE NANO-SIZED GEOMETRIC STRUCTURES NEEDED IN THE FABRICATION OF ADVANCED SENSORS, DETECTORS, OPTICAL AND MICROMACHINED COMPONENTS.

Source: USAspending.gov

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