THIN FILM DIELECTRICS DEPOSITION SYSTEM FOR DEVELOPMENT OF HIGH EFFICIENCY SUPERCONDUCTING SINGLE PHOTON DE…
Award details are derived from public USAspending.gov records. Not a bid recommendation.
Award details
- Award ID
- DOCSB134115SU1056
- Contractor
- Awarding agency
- Department of Commerce
- Sub-agency / office
- National Institute of Standards and Technology
- Award amount
- $249,550
- Period of performance
- Sep 20, 2015 – May 21, 2016
- NAICS
- 333242 — Semiconductor Machinery Manufacturing
- Place of performance
- MA
Public award description
THIN FILM DIELECTRICS DEPOSITION SYSTEM FOR DEVELOPMENT OF HIGH EFFICIENCY SUPERCONDUCTING SINGLE PHOTON DEVICES THAT UTILIZE SUPERCONDUCTING THIN FILMS AND DIELECTRIC THIN FILMS/MULTILAYERS.
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