Federal Awards · OXFORD INSTRUMENTS AMERICA, INC. · Award

TO PROCURE THE INDUCTIVELY COUPLED PLASMA (ICP) DEEP REACTIVE ION ETCHING (DRIE) TOOL TO INCLUDE ALL OF THE…

Award details are derived from public USAspending.gov records. Not a bid recommendation.

Award details

Award ID
N0017325P0063
Contractor
OXFORD INSTRUMENTS AMERICA, INC.
Awarding agency
Department of Defense
Sub-agency / office
Department of the Navy
Award amount
$687,896
Period of performance
Sep 25, 2025 – Jul 1, 2026
NAICS
333242 — Semiconductor Machinery Manufacturing
PSC
PSC 3670
Place of performance
CONCORD, MA, 017422124, USA
Competition
NOT COMPETED UNDER SAP · Set-aside: NO SET ASIDE USED. · 1 offers
Pricing
FIRM FIXED PRICE
Financial breakdown
Current value $687,896 · Obligated $687,896 · Potential value $687,896 · Latest action obligation $687,896

Public award description

TO PROCURE THE INDUCTIVELY COUPLED PLASMA (ICP) DEEP REACTIVE ION ETCHING (DRIE) TOOL TO INCLUDE ALL OF THE REQUIRED SPECIFICATIONS FOUND IN ATTACHMENT 1.

Most recent · Modification 0 · Sep 25, 2025 · $687,896 action obligation · TO PROCURE THE INDUCTIVELY COUPLED PLASMA (ICP) DEEP REACTIVE ION ETCHING (DRIE) TOOL TO INCLUDE ALL OF THE REQUIRED SPECIFICATIONS FOUND IN ATTACHMENT 1. · N0017325P0063

Source: USAspending.gov

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