SAP PURCHASE REQUISITION: 4200266570. RAPID THERMAL PROCESSOR SYSTEM FOR SEMICONDUCTOR WAFERS RT ANNEALING…

Public award description

SAP PURCHASE REQUISITION: 4200266570. RAPID THERMAL PROCESSOR SYSTEM FOR SEMICONDUCTOR WAFERS RT ANNEALING SYSTEM THE FLOOR STANDING SYSTEM SHALL PERFORM RAPID THERMAL ANNEALING OF SILICON AND SILICON CARBIDE WAFERS WITH DIAMETERS UP TO 150 MM. THE SYSTEM SHALL HAVE VACUUM PROCESS CAPABILITY. THE SYSTEM SHALL OPERATE UNDER COMPUTER CONTROL WITH PROGRAMMABLE ANNEAL TEMPERATURES, RAMP RATES AND GAS FLOWS. SYSTEM SHALL BE CAPABLE OF PROCESSING AT PRESSURES FROM ATMOSPHERE TO 1 TORR OR LOWER. HIGH VACUUM VALVES SHALL BE USED AT THE GAS INLET AND CHAMBER EXHAUST. CHAMBER SHALL BE HIGHLY POLISHED STAINLESS STEEL AND FULLY WELDED. HEATING SHALL BE ACCOMPLISHED VIA A HALOGEN LAMP FURNACE UTILIZING A STAINLESS STEEL REFLECTOR, LOCATED ON THE TOP OF THE CHAMBER. TEMPERATURE SHALL BE CONTROLLED VIA CONTROL OF WATTAGE TO THE LAMPS (NOT VOLTAGE) TO PROVIDE BETTER REPRODUCIBILITY AS THE CHARACTERISTICS OF THE LAMPS CHANGE DUE TO AGING. THERE SHALL BE AT LEAST THREE HEATING ZONES. THE SYSTEM SHALL INCLUDE A DIGITAL PID TEMPERATURE CONTROLLER. CLOSED LOOP TEMPERATURE CONTROL SHALL BE BASED UPON A MEASUREMENT BY AN OPTICAL PYROMETER OR THERMOCOUPLE, AS SELECTED BY THE USER. SUBSTRATES SHALL BE MOUNTED INSIDE THE CHAMBER USING QUARTZ PINS WHICH MINIMIZE THERMAL CONDUCTION FROM THE SUBSTRATE. QUARTZ PINS SHALL BE READILY CHANGED OUT TO ACCOMMODATE DIFFERENT SIZE SUBSTRATES. SYSTEM SHALL INCLUDE 2 STANDARD THERMOCOUPLES FOR TEMPERATURE CONTROL AND PYROMETER CALIBRATION. AN ADDITIONAL SHEATHED THERMOCOUPLE SHALL BE PROVIDED FOR USE WITH THE SUSCEPTOR. CHAMBER SHALL HAVE AT LEAST TWO THERMOCOUPLE FEEDTHROUGHS. THE SYSTEM SAFETY FEATURES SHALL INCLUDE INTERLOCKS FOR: OVERHEATING OF INFRARED LAMP REFLECTOR, FLOW OF WATER COOLING, FAILURE OF LAMP FILAMENT, FAILURE OF THERMOCOUPLE, FAILURE OF PYROMETER, FAILURE OF TEMPERATURE CONTROL, EXTERNAL FAILURE. SYSTEM SHALL INCLUDE EMO PUSH BUTTON ON FRONT PANEL AND ALARM INDICATOR. SYSTEM SHALL DISPLAY FAILURE MESSAGE ON COMPUTER IF FAILURE OCCURS. ALARM AND SAFETY SEQUENCE SHALL BE ACTIVATED BY SYSTEM SHOULD A FAILURE OCCUR.