CRYOGENIC MEMS PRESSURE SENSOR A DIRECTLY IMMERSIBLE CRYOGENIC MEMS PRESSURE SENSOR WILL BE DEVELOPED. EACH…
Award details are derived from public USAspending.gov records. Not a bid recommendation.
Award details
- Award ID
- NNX09CD35P
- Contractor
- Awarding agency
- National Aeronautics and Space Administration
- Sub-agency / office
- National Aeronautics and Space Administration
- Award amount
- $0
- Period of performance
- Jan 22, 2009 – Jul 22, 2009
- NAICS
- 541712 — Research and Development in the Physical, Engineering, and Life Sciences
- PSC
- PSC AR11
- Place of performance
- WY
Public award description
CRYOGENIC MEMS PRESSURE SENSOR A DIRECTLY IMMERSIBLE CRYOGENIC MEMS PRESSURE SENSOR WILL BE DEVELOPED. EACH SILICON DIE WILL CONTAIN A VACUUM-REFERENCE AND A TENT-LIKE MEMBRANE. OFFSETTING THERMAL EFFECTS ALLOW THE DEVICE TO OPERATE OVER A WIDE TEMPERATURE RANGE. USING A PATENTED, PROVEN DESIGN THE DEVICE IS CAPABLE OF CONTINUOUS LOW-POWER OPERATION AND PROVIDES ACCURACIES AS LOW AS 0.002 % OF READING.
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