SBIR/STTR Research Award
Metrology of thin films on sapphire substrate
Award amount
$149,974Program and phase
STTR · Phase IAward year
2017Award details
- Awarding agency
- Department of Defense
- Branch
- Defense Microelectronics Activity
- Recipient company
- OPTOWARES INC
- Proposal award date
- 2017-09-28
- Contract end date
- 2018-04-10
- UEI
- L8NSHTM6E7U3
- Solicitation number
- 2016.0
- Topic code
- DMEA16B-001
Research abstract
There is a lack of non-destructive metrology tool to measure the thickness of thin films on sapphire substrate due to the transparency of the
Technology keywords
Not reported
Other awards by this recipient
Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.
- Ambient Pressure-Dried Ormosil Hybrid Aerogel Composite Blankets for Advanced Space Suit Insulation
- Low-SWaP real-time plasma sensor for hypersonic flight
- Ambient Pressure-Dried Ormosil Hybrid Aerogel Composite Blankets for Advanced Space Suit Insulation
- Electromagnetic Manipulation of Plasma Sheath on Hypersonic Vehicles
- Innovative Aerogel Production for Low-cost and High-R Insulation
Awards with the same topic code
Verified by an exact topic code match. This is not a text-similarity match.
- Metrology of Thin Films on Sapphire Substrate
- Thickness Measurement Technology for Thin Films on Sapphire Substrate
- Thickness Measurement Technology for Thin Films on Sapphire Substrate
Research funding history
60 SBIR/STTR records share this UEI (2004–2025). Reported award amounts total $36,777,388. Reported amounts are not federal obligations.
Phases: Phase II, Phase I
Agencies: Department of Defense, National Aeronautics and Space Administration, Department of Transportation, Department of Energy