Development of High Volume Manufacturing Technologies for Superconducting Bolometer Array Production

A recent report of the 25-member Particle Physics Project Prioritization Panel (P5) recommends funding cosmic microwave background (CMB) experiments under all budget scenarios, specifically, the next-generation ground-based CMB experimental program whose aim is to provide definitive measurements of the early universe. For this program, large focal plane arrays with ~100,000 detectors and associated readout amplifiers and interconnecting components will be required, which exceeds the capacity of existing laboratory and university facilities. We describe a research plan to develop a pilot production process for the fabrication of CMB detectors on 6-inch wafers for CMB measurement instruments, and a plan to transition these processes for high-volume manufacturing (HVM) readiness in Phase II. During Phase I, we will optimize processes for the deposition of low-loss dielectrics and Mn doped Al films, and develop a pilot production process for CMB detector fabrication on 6-inch wafers using these films. We will also develop a plan to transition these processes to high volume manufacturing (HVM) readiness in Phase II. The technologies and infrastructure to be developed through Phase I and Phase II will have direct applicability to other products and market applications STAR Cryoelectronics currently serves, including superconducting sensors for biomedical imaging, non-destructive testing of materials, and geophysical exploration. In particular, the expanded process capabilities will enable the company to improve sensor and detector production for two types of X-ray spectrometers the company offers for materials analysis and basic research. These instruments are in demand by semiconductor manufacturers and researchers at synchrotron facilities.