High Temperature High Resolution in-situ Differential Pressure Sensor

Chemical manufacturers require high accuracy and high sensitivity pressure sensors to efficiently monitor the various manufacturing systems and processes in the chemical plant, to ensure any changes proceed in a safe and reliable manner, adhering to expected standards and practices. In addition, NIST has a need for highly accurate absolute and differential pressure measurements, especially for determining the thermo-physical properties of fluids. Such measurements must be made at the highest standard possible. Since the market is currently limited in the availability of such pressure sensors, i.e. possessing a combination of high accuracy/high temperature capability with excellent accuracy, NIST is seeking a high temperature, in situ, pressure sensor that can achieve better performance than the current state-of-the-art. Innoveering will develop an innovative, compact High Temperature High Resolution (HTHR) in-situ differential pressure (DP) sensor that leverages our team’s MEMs pressure die technology, which utilizes piezo-resistive elements to sense differential pressure as well as an over-pressure protection feature to ensure reliable and safe operation to meet NIST’s requirements. Our team brings together experts in the design/fabrication/testing and application of harsh environment pressure sensors, MEMS microfabrication techniques as well as packaging/welding techniques for these types of high pressure high temperature sensors.