PIC-Based Physical Sensors with Low Noise and Extreme Dynamic Range

The proposed PIC‐based physical sensor platform leverages advanced integrated photonic circuits and MEMS structures to achieve ultra‐low noise and extreme dynamic range. By integrating a silicon nitride waveguide on a flexible silicon cantilever—with a bulk proof mass—and employing on‐chip acousto‐optic modulation (AOM), our design enables heterodyne detection that converts minute mechanical displacements into measurable optical phase shifts. The sensing arm, which undergoes phase modulation due to cantilever vibrations, is combined with a frequency‐shifted reference arm, allowing demodulation of the phase over many optical fringes. This innovative approach extends the intrinsic dynamic range (IDR) well beyond the limits of conventional interferometric sensors—targeting an IDR of up to 160 dB—while maintaining a displacement noise floor on the order of 10 fm⁄√Hz. The compact chip-size sensor package reduces size, weight, and power (SWaP) compared to traditional systems with similar performance. Phase 1 will focus on developing a laboratory prototype using PICs with integrated cantilevers and off‐chip AOMs to validate the heterodyne detection concept, model system nonidealities (including oscillator and mixer noise), and establish a solid foundation for full integration in Phase 2. This work promises to bridge the gap between high‐sensitivity optical sensors and the demanding dynamic range requirements of next‐generation inertial measurement applications.