SBIR/STTR Research Award
High Speed, High Resolution X-ray System for Inspecting Integrated Circuits
Award amount
$1,499,462Program and phase
SBIR · Phase IIAward year
2014Award details
- Awarding agency
- Department of Defense
- Branch
- Defense Microelectronics Activity
- Recipient company
- SVXR
- Proposal award date
- 2014-09-11
- Contract end date
- 2015-12-14
- UEI
- YLKLHQM1A1C5
- Solicitation number
- 2012.2
- Topic code
- DMEA122-001
Research abstract
The company proposes to design, build and test a prototype system for high-speed x-ray inspection. The system will be based on a new method of x-ray imaging that allows for high-NA x-ray illumination using standard laboratory (non-synchrotron) x-ray sources. A high-resolution, large field-of-view detector permits large field-of-view, high-resolution imaging.
Technology keywords
Not reported
Awards with the same topic code
Verified by an exact topic code match. This is not a text-similarity match.
- Optimized X-ray Microscope (OXM) for IC Reverse Engineering
- High Speed, High Resolution X-ray System for Inspecting Integrated Circuits