Semiconductor Nanomembrane based Sensors for High Frequency Pressure Measurements

ABSTRACT: The Air Force Phase I program would develop and demonstrate semiconductor nanomembrane (NM) based sensors and arrays for high frequency pressure measurements, using SOI (Silicon on Insulator) NM technique in combination with our pioneering HybridsilTM copolymer nanocomposite materials. NanoSonic would work cooperatively with Virginia Tech to develop an improved mechanical and electrical model of semiconductor nanomembrane based sensor performance that will allow quantitative optimization of material properties and suggest optimal methods for sensor attachment and use for high frequency measurement applications. We will perform synthesis of sensor skin materials with optimized transduction, hysteresis and environmental properties, specifically for high Reynold"s number flow and also varying temperature use. We will fabricate patterned two-dimensional sensor arrays and internal electronics using optimized materials. NanoSonic and Virginia Tech will perform complete analysis of sensor cross-sensitivities and noise sources to allow optimization of signal-to-noise ratio and practical sensor sensitivity. Support electronics will be developed to acquire, multiplex, store and process raw sensor array data. NanoSonic and Virginia Tech will also experimentally validate sensor array performance through extended water and wind tunnel evaluation, and possible flight testing with Lockheed Martin Aeronautics, and produce a first-generation high temperature high frequency pressure sensor array and data acquisition electronics system for sale. BENEFIT: Primary customers would be university, government laboratory and aerospace industry researchers. Small, unmanned air vehicles large enough to carry the extra load associated with electronics and power, and operationally sophisticated enough to require air data sensors would be a likely first military platform use. Distributed pressure mapping on air vehicles as well as in biomedical devices and other systems may have merit. Further, the thin film shear sensor elements may be used as air flow or water flow devices in systems where either the low weight, low surface profile, lack of need for space below the flow surface, or high sensitivity at a low cost are needed.