Integrated DC-DC Converters Using Thin-Film Magnetic Power Inductors

All computing platforms, from handhelds to servers, can achieve superior energy efficiency with better control of the power supply. An integrated voltage regulator would provide improved control, but requires improvements in on-chip inductors for energy storage. This project will develop manufacturing processes and compact models for thin-film magnetic power inductors. These inductors will incorporate high quality magnetic materials for enhanced energy storage and will be integrated with conventional CMOS manufacturing processes through partnership with IBM, Global Foundries and TSMC to enable integrated voltage regulation. Under Phase I of this project, Ferric Semiconductor improved their thin-film magnetic core power inductor process so that it would be amenable to high volume manufacturing. This process was transferred to 200mm wafers and compact models were developed to enable circuit simulation of these devices in modern EDA flows. Under Phase II of this project, the inductor fabrication process will be improved further, addressing issues such as film stress and shortcomings in the current patterning process. The fabrication process will be optimized for improved reliability and variability and performance. Commercial Applications and Other Benefits: Incorporating magnetic materials into CMOS manufacturing promises to improve the competitiveness of the US semiconductor industry. This technology will enable integrated voltage regulation, which can exert greater control over the power supply in microprocessors and consequently, improved performance-per-watt. Integrated voltage regulators will allow energy efficiency gains as high as 30% in processors for all computing platforms, from high-end servers to smart phones, resulting in a direct annual energy savings of almost 15 billion kWh nationally, and 50 billion kWh globally. This technology will also result in significantly reduced component cost and voltage regulator form factor.