SBIR/STTR Research Award
Chemical Analyzer System for In Situ and Real Time Surface Monitoring for Composition Control During Synthesis of Compound Semiconductor Films
Award amount
$149,826Program and phase
STTR · Phase IAward year
2013Award details
- Awarding agency
- Department of Defense
- Branch
- Army
- Recipient company
- Staib Instruments, Inc.
- Proposal award date
- 2013-09-26
- Contract end date
- 2014-03-17
- UEI
- L5LGNYLULE23
- Solicitation number
- 2013.A
- Topic code
- A13A-T011
Research abstract
The overall objective of this proposal is to evaluate the new in-situ growth monitoring system, Auger Probe, in an MBE environment for reliable and reproducible, highly precise results. State-of-the art data manipulation techniques will be used without impacting the growth process (MBE in this case). Using Auger Electron Spectrometry (AES), the Probe system will be used for in situ, real time analysis and control of surface elemental compositions during MBE growth of compound semiconductor materials. Demonstrations will be performed on III-V compounds [such as (Al,In,Ga)(As,Sb)], but the methods will be developed in such a way that they could be adapted to other materials systems.
Technology keywords
Not reported
Other awards by this recipient
Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.
Research funding history
2 SBIR/STTR records share this UEI (2013–2014). Reported award amounts total $1,149,441. Reported amounts are not federal obligations.
Phases: Phase II, Phase I
Agencies: Department of Defense