Large-Format Membrane Mirror Light Modulator for Infrared Scene Projection

ABSTRACT:This Phase II SBIR effort will focus on the design and fabrication of a wide-format mid-wave infrared scene projector (with 1000x500 pixels, each 40 um on a side) based on VLSI-Membrane-Mirror-Light-Modulator (VLSI-MMLM) technology.They key technologies that will be developed in this program to make this project successful include: (1) reticule stitching of the required large-area high-voltage VLSI driver chip, (2) The development of polymer MEMS structures to support the membrane mirror atop the large rectangular chip, and (3) the development and implementation of an off-axis Three-Mirror, Anastigmatic (TMA) optical readout system to eliminate stray light and thereby optimize the contrast ratio of the system.The electronic interface to the VLSI-MMLM will also be updated to be fully compatible with the large-format VLSI chip and to support its operation.The modulator will employ a mostly-metal membrane for low-temperature operation down to -35C.In addition to low temperature operation, the performance goals of wide-format projector include: 2,000:1 contrast ratio, 120 Hz framing rate and flickerless operation with at least an 8 field of view.BENEFIT:This research is expected to lead to a family of compact, low-cost, high-performance large-area infrared projectors that offer operation over a large temperature range, large numbers of pixels, high temperature resolution, and multispectral operation ranging from the visible to the long-wave infrared.Commercial applications of the technology include: (1) multi-spectral and infrared scene projectors for government and commercial testing applications (2) visible, mid-wave and long-wave infrared shutters, (3) spatial light modulators for optical signal processing and adaptive optics, (4) sensors and systems for industrial inspection, robotic vision and medical imaging, and (5) large-screen projection displays such as digital cinema.