A high sensitive MEMS micro-gyroscope

Leveraging on our experience in MEMS component and sensor system fabrication, Agiltron proposes to realize a new type of MEMS microgyroscope with a simple scalable mechanism and high precision. The gyroscope will be fabricated in a MEMS structure, with a novel design concept that maximizes the resonant frequency difference between the driving and sensing mode, tuning the sensing mode to near free floating state. This will result in a sensor with unparalleled performance on low noise and bias stability, and provide a unique solution for cost-effective mass production. Being a sealed MEMS device, the gyroscope will be able to withstand severe environmental conditions in hand-held laser rangefinders. In the Phase I program, the feasibility of the proposed accelerometer technology will be demonstrated through both design and sensor fabrication.