Optimized Electrodes for Low-Loss On-Chip Microwave Devices

The goal of this program is to develop a new sandwich electrode technology for low-loss microwave devices. The electrode consists of a thick high-conductivity layer sandwiched between two high-stability oxidization resistant thin cladding layers. The thick layer ensures low electrode resistance loss and limits radiation of energy from device to the substrate. The thin cladding layers protect the thick layer from diffusion and oxidization during device oxide deposition on the electrode and enable high-quality active layer deposition. We have clearly demonstrated the general feasibility of such a sandwich electrode approach. Our goal in Phase II is to optimize and document a sandwich electrode technology for ferroelectric and ferromagnetic microwave devices as test vehicles for sandwich electrodes. The results from this Phase II program will provide a solid foundation for Phase III commercialization.