3D Tip Characterization and Surface Reconstruction

Nanometrology International, Inc. (NMI) proposes to demonstrate the feasibility of 3-dimensional (3D) characterization of nanoscale objects using scanning probe microscopy (SPM) with a measurement uncertainty of less than 0.7 nm. To accomplish this task, we propose a novel method of 3D tip characterization and use of an innovative surface reconstruction algorithm recently introduced by NIST and the Illinois Institute of Technology (IIT). The crucial next step is implementation into systems useful to the industry. Our team comprises experts in tip characterization and image reconstruction, and critical dimension (CD) atomic force microscopy (AFM) reference metrology. Specifically, this includes the co-developer of the dexel method together with the first individual to introduce CD 2D image reconstruction and then integrate the methods into a commercial instrument (X3D and InSight). Successful demonstration of feasibility will be built on the innovative technology introduced by NIST, our novel 3D characterization technique and the core expertise of our team. Once the feasibility of 3D tip characterization and surface reconstruction is demonstrated, technology development will be implemented in Phase 2 commercial development of characterizers and software.