Improved MEMS inertial sensors with interferometric detection

This Small Business Innovation Research Phase I project will develop navigation grade MEMS inertial sensors that use an ultra high resolution sensing technique for measuring proof mass motion. The goal of the project is to demonstrate the feasibility of this concept by understanding the optical, mechanical, and electrical performance characteristics that result from using micro interferometric sensing in MEMS inertial sensors. Specific objectives of the Phase I effort are to (1) develop a system level model that captures the behaviors of interest and enables design decisions (2) demonstrate sufficient optical performance for high resolution sensing in a prototype scale package and (3) produce robust designs for an accelerometer and gyroscope. These technical areas will be explored to better understand the development risk and potential for commercial applications in high margin instrumentation markets and low margin consumer electronics markets.