In-Situ Extended Lateral Range Surface Metrology

We propose to develop an extended lateral range capability for a dynamic optical profiling system to enable non-contact, surface roughness measurement of large and aspheric astronomical optics in-situ during manufacture. This instrument will be capable of measuring more than three decades of spatial frequency range for determination of rms surface roughness. It will be insensitive to vibration, being based upon our patented phase-sensor technology, and capable of being mounted on a computer-controlled polishing machine for in-situ measurement of large, aspheric and freeform optics. Objectives for Phase I are to demonstrate a novel automatic alignment system enabling in-situ extended lateral range surface profiling, demonstrate an extended lateral range concept, and to demonstrate a measurement range of more than three decades in spatial frequency. Anticipated results of Phase I will be documented laboratory demonstrations of these capabilities. Our TRL before Phase I is 2-3, after Phase I we anticipate a TRL of 3-4 and after Phase II a TRL of 6.