MEMS Lamellar Based Interferometer for the Detection of Toxic Chemicals

Leveraging on Agiltron’s industry leading development of optical MEMS devices and the PI’s experience with FTIR spectrometer design, we propose to develop a new class of high performance compact and rugged FTIR spectrometers for LWIR optical range. The design is based on the MEMS lamellar mirror technique. Although this approach is not new, it has not yet been efficiently applied to LWIR, and performance of existing devices is completely inadequate in this range. The Agiltron approach would advance both the resolution and signal-to-noise ratio of MEMS FTIR spectrometers by orders of magnitude. Using the developed lamellar mirror it would be possible to produce a compact instrument similar in function to the Joint Chemical Agent Detector (JCAD). Being based on Infrared Absorption Spectroscopy technique such an instrument would have an advantage of being more sensitive, universal, reconfigurable and less prone to errors and false-positive alarms. The technical approach will be proven in Phase I through the numerical analysis, design, trial manufacturing and testing. A prototype MEMS lamellar spectrometer chip will be produced at the end of Phase I for delivery to the Chemical And Biological Defense Program. Further development and delivery of a complete spectrometer will be proposed for Phase II.