Nanometer-Precision Positioning System with 2mm x 2mm Range of Motion

nPoint proposes to design and construct a closed-loop 2mm range-of-motion, 2-axis nano-positioning system with unprecedented precision and resolution. There is considerable need for such a tool in near-future nanomanufacturing, characterization, and lithography. One example is scanned-probe tip-based nanomanufacturing. As such manufacturing comes to commercial fruition, accurate long-range positioning will be essential. All forms of nanolithography - e-beam, nanoimprint, interference – will gain from closed-loop, high-precision long-range motion. Magnetic-date storage companies require surface profile metrology over a large distance and are demanding improvements in the range of motion at unyielding specifications on precision, out-of-plane motion, or resolution. The proposed positioner addresses all these needs, through the combination of novel developments in long-range positioner design and integration of novel sen-sor technology.