MEMS Vibro-Mechanical Energy Harvester for Powering Wireless Sensors

AGILTRON proposes to realize a new MEMS energy harvester capable of powering in-situ micro sensors and their wireless modules under harsh operational environments. The design overcomes current shortcomings and achieves sufficient power output, reliability, miniature size, and low cost. The approach incorporates several innovations including stable electromagnetic structure, efficient power generation, wide frequency response, and advanced packaging. The approach is suitable for near term commercialization. The feasibility of the key breakthrough was successfully demonstrated in Phase I; in Phase II we will design, fabricate, and test a state-of-the-art MEMS harvester with ruggedized assembly and package that meet the power and reliability operational requirements for naval aircraft environments. Subsequent energy harvester production in Phase III is anticipated as the outcome of this Phase II program.