Miniature MEMS-based Data Recorder for PHM

This SBIR Phase I proposal requests support for Ridgetop Group, Inc. to demonstrate the feasibility of producing a microelectromechanical system (MEMS) sensor with a CMOS embedded technology. This proposal responds to Navy Topic N092-100, “Analysis of Prognostic Sensor Technologies for MEMS Applications in Military Systems.” An experienced provider of advanced prognostics, Ridgetop will introduce the first known low cost, low power, and lightweight data monitoring solution for prognostic health management (PHM). This innovative solution uses a MEMS-first process methodology to fabricate MEMS sensors for temperature, shock, and vibration onto a single substrate that also contains sub-micron scale CMOS devices for the associated read-out and storage electronics. Phase I activities include the study and design at transistor level of the smart MEMS sensor. The research will performed at Ridgetop Group, Inc. and laboratories at University of Arizona, Tucson AZ will be utilized to develop and test the MEMS sensor. Phase II activities will focus on the pre-production of the prototype. The principal investigator, Justin Judkins, Ph.D., is well qualified to perform this work and has lead similar projects involving CMOS embedded system, data acquisition, sensor interface, and power management for extended battery life application.