High-Speed Scanning Interferometer Using CMOS Image Sensor and FPGA Based on Multi-Frequency Phase-Tracking Detection

In this SBIR, we propose a new type of laser interferometer engine for in-situ large optics inspection and metrology and supporting system platform. The proposed FPGA signal processing concept together with new generation high-speed CMOS image sensor enables high speed (> 1m/sec) and real-time continuous surface profiling with minimum local memory. This transforms the currently available laser interferometer into a sub-nanometer precision instrument with only minor modification while providing easy scalability for large optic surface testing and measurement capability simultaneously.