SBIR/STTR Research Award
Cryogenic MEMS Pressure Sensor
Award amount
$100,000Program and phase
SBIR · Phase IAward year
2009Award details
- Awarding agency
- National Aeronautics and Space Administration
- Branch
- Not reported
- Recipient company
- WYOMING SILICON, LLC
- Proposal award date
- 2009-01-22
- Contract end date
- 2009-07-22
- UEI
- NME7NFJ4YRN8
- Solicitation number
- Not reported
- Topic code
- X7.03
Research abstract
A directly immersible cryogenic MEMS pressure sensor will be developed. Each silicon die will contain a vacuum-reference and a tent-like membrane. Offsetting thermal effects allow the device to operate over a wide temperature range. Using a patented, proven design the device is capable of continuous low-power operation and provides accuracies as low as 0.002 % of reading.
Technology keywords
Not reported
Other awards by this recipient
Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.
Awards with the same topic code
Verified by an exact topic code match. This is not a text-similarity match.
- Water Management Membrane for Fuel Cells and Electrolyzers
- Advanced Oxygen Evolution Catalysts for PEM Electrolyzers
- Novel Conductive Water Removal Membrane (CWRM) for PEM Passive Fuel Cell Operation
- Advanced Oxygen Evolution Catalyst for Electrolyzer Energy Storage for Lunar Surface Systems
- Water Management Membrane for Fuel Cells and Electrolyzers
Research funding history
3 SBIR/STTR records share this UEI (2008–2010). Reported award amounts total $350,000. Reported amounts are not federal obligations.
Phases: Phase I
Agencies: National Science Foundation, National Aeronautics and Space Administration