Single Crystal Piezoelectric Deformable Mirrors with High Actuator Density and Large Stroke

Single crystal piezoelectric deformable mirrors with high actuator density, fine pitch, large stroke and no floating wires will be developed for future NASA science and communications applications. Single crystal piezoelectric DMs share the fine pitch with co-fired electrostrictive or ceramic piezoelectric DMs and MEMS DMs, but with large stroke at relatively low voltages ( 300K). Specifically, a 32x32 actuator array with stroke > 2 um, pitch of 12 um, pitch of < 2mm will be developed for fine and coarse DMs. Actuator driving electronics will be scaled up to a multi-channel actuator driver and optimization of the design, facesheet mounting process and characterizations for deformable mirrors will be investigated.