Manufacturing of a low-cost, high efficiency, solid-state neutron detector

The main objective of this DNDO SBIR-funded effort is to enable large-scale and economical production of high-sensitivity, solid-state, thermal neutron detectors for use in radiological inspection. The Phase I project successfully demonstrated a novel, energetic ion technique for depositing the active material, boron-10, onto the patterned silicon, which forms the substrate for the device. Micron-scale trenches of about 3:1 aspect ratio were completely filled with dense, pure boron, with minimal ridge coating and with no substrate damage. The project paralleled the continuing development of "Pillar Array", high efficiency neutron detectors at the Lawrence Livermore National Laboratory (LLNL). In the Phase II project this deposition processes will be validated and optimized for the devices based on the Pillar Array concept and the work will be in close collaboration with LLNL to help move the optimized device to the commercial stage. The work at HY-Tech will include infill of larger aspect ratio trenches and scale up to 4" wafer. Testing at LLNL will include stress analysis, as well as thermal neutron conversion efficiency measurements to qualify the deposited material. HY-Tech will also work with LLNL to develop partnerships with potential industry partners to facilitate the transition to the commercial stage.