Advanced NDE for SiC Optics Using Micromachined High Frequency Phased Array Ultrasound

TRS is pleased to propose an in-situ NDE imaging tool for SiC mirror surface damage (SD), sub-surface damage (SSD) and trapped internal stress detection using piezo-composite based micromachined ultrasound transducer (PCMUT) phased array technology. PCMUT technology has been developed at TRS to fabricate high frequency ultrasound transducers with broad bandwidth and high sensitivity. Phased array (PA) ultrasound NDE has offered significant technical advantages over conventional single element ultrasound by means of electronic scanning, beam steering and electronic focusing. Broadband PC-MUT phased arrays are expected to contribute to rapid NDE imaging with high spatial resolution in both the lateral and axial directions as well as deeper penetration depth, which will greatly benefit in-situ detection of SiC mirror SD and SSD as well as trapped internal stress measurement. The proposed PCMUT PA technology can also be used for ceramic armor NDE, aircraft body inspection, and high frequency bio-medical 3D and 4-D imaging.