Micromachined Nano-G Accelerometer

Micro- and nano-satellites are being planned for use on future scientific space missions. However, since their payloads are much smaller than traditional satellites, the instruments used on these next generation satellites need to be miniaturized (in mass, size, and power). In order for small satellites to be used to map and model the atmosphere, a miniaturized accelerometer that can measure accelerations as low as 10 nano-g is required. Creare and our collaborators from Stanford University’s Gravity Probe B instrumentation team propose to design, fabricate, test, and deliver a micromachined nano-g accelerometer. Our micromachined accelerometer is based on previously demonstrated technologies: innovative micromachined structures; capacitive position sensing; electrostatic actuation; and advanced signal processing of spectrally shifted acceleration measurements. These sensing techniques have been demonstrated on Gravity Probe-B to be capable of measuring 10 pico-G. By combining these previously demonstrated technologies in an innovative way, we expect to develop a nano-g accelerometer with mass less than 300 grams, that occupies volume less than 200 cubic centimeters, and which consumes less than 10 W of power. During Phase I we will demonstrate the feasibility of our approach. During Phase II, we will fabricate, test, and deliver a prototype micromachined nano-g accelerometer based on our innovative design.