High Temperature High Frequency MEMS Sensors

ENGeniousMicro proposes to develop a micromachined sensor that will operate at high temperatures with high frequency response to measure surface pressure, shear stress, and heat flux distributions. Through the use of micromachining technologies, we will develop a sensor that has a small form factor and can be flush mounted on the object to be monitored. Our sensor will be designed to have a frequency response equal to or greater than 1 MHz and will utilize micromachining materials such as tungsten and alumina and diamond to achieve compatibility with high temperature environments. Passive wireless capabilities will be leveraged to eliminate the need for complex interconnects and allow easy sensor reconfiguration.