Adaptive, High-Resolution Accelerometer for Extreme Dynamic Range

Tao Systems proposes to develop an adaptive accelerometer for obtaining high-resolution measurements for an extreme dynamic range. Specifically, the accelerometer will provide 60dB resolution from 0.001 g to 100,000 g through through the integration of tailored MEMS accelerometer devices in an Active Sensor Circuit (ASC) configuration. The effort will require optimization of each accelerometer device for survivability and reliable operation during and after shock, ASC fabrication for the devices, and intelligent signal processing algorithms implemented on COTS hardware. The approach integrates state-of-the-art dynamic resistance measurement technology with advanced, customizable MEMS fabrication techniques. In the Phase II effort, we shall design, fabricate and demonstrate a single-axis shock-survivable MEMS accelerometer devices with an ASC-based system that will maintain a high output resolution over a dynamic range through intelligent signal processing of the device array.