Analyses of Coating Materials/Deposition Techniques and Device Designs for FIB-Resistant Systems

In this Phase II program, Engineered Coatings, Inc. and our team NanoSonic, Analytical Solutions, Inc., and VLSIP will formulate and apply a new low-temperature-cure anti-tamper (AT) coating material, ceramic-reinforced PTFE/copolymer. This material was predicted in our Phase I trade study to offer the best resistance to multiple removal environments (ion, chemical, and mechanical methods). Our approach for Phase II is: 1) Coating material and deposition method selection update, 2) Coating application, 3) Coating evaluation and removal trials, 4) Coating application to A/D devices, 5) Device coating evaluations, 6) Demo of AT-coating resin in commercial machine, and 7) Program management. In Tasks 2 and 4, we will develop a materials and process (M&P) specification for AT resin formulation and application in conformal coating dispenser heads. In Tasks 3 and 5, we will evaluate AT-coated passivated silicon wafers (Task 3) and AT-coated devices (Task 5), in aggressive removal exposures (ion, chemical, and mechanical methods), environment-exposures, and with electrical performance tests (pre and post-removal attempts). In Task 6, we will demonstrate the AT coating resin in a commercial conformal-coating machine for a semiconductor/packaging manufacturer. In Task 7, we will assess the market for AT-coating resin systems and AT-coating toll services.