SBIR/STTR Research Award

Mass Fabrication of Hermetic MEMS Micro Detonators

Award identifier 7c58a78221d4846b595d2025193060b70e61967290482362bfc13ab42a6b866aAwarding agency Department of Defense · Army

Award amount

$1,305,000

Program and phase

SBIR · Phase II

Award year

2006

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Award details

Awarding agency
Department of Defense
Branch
Army
Recipient company
MICROASSEMBLY TECHNOLOGIES, INC.
Proposal award date
2006-09-14
Contract end date
2010-06-26
UEI
Not reported
Solicitation number
2003.2
Topic code
A03-009

Research abstract

The proposed SBIR Phase II project aims to develop a hermetic microdetonator that can be manufactured at low-cost using entirely high-throughput processes. Hermetic sealing will be performed using a low-temperature wafer bonding process.

Technology keywords

Not reported

Awards with the same topic code

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Agency intelligence

Department of Defense

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