MEMS Testing Simulator

MEMS with sensors, actuators and control functions in a large network system often needs to work in a harsh environment involving changes in mechanical, chemical, and electromagnetic loading in wide ranges of frequencies and at high intensities. The main objectives of this SBIR program are to develop a MEMS simulator that can provide simulated loading/environment for accurate assessment of MEMS reliability, and to achieve high reliability by developing a new MEMS packaging technique with self-diagnosis and self-recovery functions. This is achieved by the application of smart materials that can automatically respond to external loading, thus, reducing the tendency of microstructural damage. In addition, new testing methodology will be developed with use of embedded sensors and with wireless communication capability in monitoring packaging process and operation. The developed understanding, technology and testing simulator will be beneficial to the growing MEMS industry and users, including the automotive, aerospace, biochemical and consumer sectors.