SBIR/STTR Research Award

Microelectromechanical Systems Packaging

Award identifier 35dba123f324ea98465255ff15f429151611e8149d272e63168ac1e0512aa7a8Awarding agency Department of Defense · Army

Award amount

$119,992

Program and phase

SBIR · Phase I

Award year

2006

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Award details

Awarding agency
Department of Defense
Branch
Army
Recipient company
LASERLITH CORP.
Proposal award date
2006-01-29
Contract end date
2006-07-31
UEI
Not reported
Solicitation number
2005.2
Topic code
A05-147

Research abstract

Many standard packaging methods pose problems for high-g MEMS. Wirebonds can fail or drift electrically under high shock conditions. Wafer-level approaches may lack required strength, and impose undesirably high temperatures. The proposed project will assess failure modes for high-g MEMS devices and results will be presented in a database.

Technology keywords

Not reported

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Agency intelligence

Department of Defense

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