Tunable, Low Mass, Low Loss, Millimeter Wave, MEMS RF Filters

Emerging military, space and commercial communications systems, are placing a high premium on low-cost, small, light-weight RF electronic components, while at the same time increasing demands for higher functionality. Multiple communications and Radar systems are operating or being designed for the Ka-band (25-40 GHz) and above. This trend necessitates the utilization of high performance RF filters that operate well at that frequency band. In response to the above need, EMAG Technologies in collaboration with Purdue University propose to develop a novel, MEMS tunable high-Q filter. The proposed filter will be comprised of a series of evanescent mode cavities, which will be tuned with the use of a piezoelectric actuator. The proposed architecture requires a number of novel technologies that permit excellent RF performance, limited power consumption, low size and cost, high reliability and space qualification. In addition to that, on-wafer packaging and three-dimensional integration will be utilized for the hermetic sealing of the filters and MEMS varactors. This packaging scheme will be based on EMAG's already developed low-loss, hermetic package for single RF MEMS switches. The completed filter will be fabricated on a silicon wafer, thus allowing its integration with other planar active or passive components.