1024x1024 Snapshot IR FPA for Air-to-Ground Applications

We propose to develop a 1024x1024 infrared focal plane array (FPA) sensitive over the 3-12 micron spectrum, capable of a snapshot readout and compatible with legacy system optics for precision targeting. Its mega-pixel resolution images detailed target characteristics, its 3-12 micron coverage detects targets over a wide range of intensities, its snapshot readout provides high-fidelity images with reduce artifacts and its small pixel pitch makes it compatible with legacy system optics. Made with pixels of micro interferometers as the sensing elements, it's also capable of high sensitivity over the operating temperature range of 77K to 300K. It's fabricated entirely of silicon (Si) for robustness, reliability and producibility using commercial CMOS (complementary metal oxide semiconductor) foundries for production at low cost. Phase I will analyze and design the FPA structure and layout, delineate the processes for fabrication and fabricate a simple structure to demonstrate its fabricability. Phase II will fabricate the FPA and test it with supporting optics and electronics.