Very Low Absorption Interference Coatings for 1.0 to 1.3 Micron Laser Optics

This SBIR project is aimed at the development of very low absorption optical coatings, for components used in the Airborne Laser (ABL) missile defense system. We are developing a novel thin film deposition technology, based on remote plasma enhanced metal organic chemical vapor deposition (RPE-MOCVD). This technology is capable of producing oxide coatings with exceptional purity, excellent oxygen stoichiometry, low residual stress and very low optical absorption. The process can also deposit coatings conformally onto non-planar substrates. In Phase I, we built a small-scale prototype of the RPE-MOCVD deposition system. We demonstrated single layer films and multilayered optical coatings of SiO2 / Ta2O5. We designed and produced samples of a 13-layer reflector, as a demonstration for our sponsors. In Phase II, we will scale-up the deposition technology to deposit optical coatings on large area substrates. We will work closely with our sponsors (and prime contractors) to develop and demonstrate functional optical coatings, such as reflectors, anti-reflection coatings and filters. We will demonstrate these coatings on actual components used in high power laser applications. In phase III, we will commercialize this technology for MDA needs, as well as for other potential military and commercial applications.