Manufacturing Assembly Technology for Producing Low-Cost Mini SEMs

This program will provide a key manufacturing breakthrough for high-performance inexpensive miniature SEMs. We plan to develop a MEMS, microassembly-based, fully functional mini-SEM having 1/10,000 the volume of current units. Zyvex is a dynamic small firm with a highly qualified technical team, experienced management, and the advantage of a $25M / 5 year NIST-ATP award that is funding the continued development of the core assembly technology. Our commercialization partner in Phase II, FEI, is one of the leading manufacturers of SEMs and has committed to at least $200K of in-kind support. Zyvex's unique assembly technology combined with FEI's expertise and experience in successfully producing and marketing charged particle microscopes provides us with an excellent opportunity for commercialization. DoD applications include: routine maintenance inspection of helicopter rotors and other critical structural members of military aircraft and vehicles; backpack units to give special forces unique forensic capabilities; and an imaging component of biowarfare agent detection systems to protect both military buildings and war-fighters in the field. Commercial applications include: desktop SEMs for industrial and educational institutions; backpack units for geologists, forensic specialists, etc.; arrayed SEMs for IC inspection; and arrays of columns for maskless high-resolution lithography.