3D Self-Assembled Optical and Fluidic Microsystems Using Ultraprecision Diamond Machining and Metal Electroplating

The proposed Phase II SBIR project will result in a new technology for producing true-3D, multilayer structures using ultraprecision machine tools, in combination with MEMS manufacturing methods. This new technology will focus primarily on metal structural layers and will be suitable for producing complex optical and fluidic systems. The manufacturing process model proposed is distinct from all prior approaches to MEMS manufacturing. It exploits the best features of high-speed diamond ultraprecision machining, and combines them with self-assembled, compact microsystems to yield devices with integrated, efficient actuators and unparalleled design flexibility. Fully three dimensional shapes can be incorporated into this platform, significantly enhancing the design space available. An active optical mirror device that will be manufactured using this approach in the Phase II project will serve to demonstrate the usefulness of these enhanced production techniques, while simultaneously delivering an important and enabling component for military and commercial optical systems.