SBIR/STTR Research Award

Safe Removal of Arsenic Dust from Gallium Arsenide Cryst

Award identifier 31565a30dbe4521e151e6ad18dae4ff4a9a44224bf2991ea549e3659c4a0d31cAwarding agency Department of Health and Human Services

Award amount

$75,177

Program and phase

SBIR · Phase I

Award year

1994

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Award details

Awarding agency
Department of Health and Human Services
Branch
Not reported
Recipient company
Ware Technical Services, Inc.
Proposal award date
Not reported
Contract end date
Not reported
UEI
Not reported
Solicitation number
Not reported
Topic code
Not reported

Research abstract

We will make a major improvement in the safety of operation of Liquid Encapsulated Czochralskicrystal pullers used in the growth of gallium arsenide. The hazard is caused by the presence of finelydivided arsenic dust on the inside of the pullers after growth. Some of this is believed to convert toarsine. Operators remove the dust by vacuum cleaning and scrubbing with tissues, and hence areexposed to high levels of toxic and carcinogenic material. The hazard will be eliminated by chemicalremoval of the arsenic. This will eliminate the health risk to operators, decrease operator turnover (thepuller cleaning job is generally detested) and improve the economics of the process by saving the hoursspent cleaning. The economics will also be improved by reducing the volume of toxic waste andproducing it in a form that is more easily handled.

Technology keywords

Not reported

Agency intelligence

Department of Health and Human Services

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