An Equilibrated Micromachined Pressure (EMP) Sensor for Hypersonic Transients

Research Support Instruments, Inc. (RSI), with the aid of Princeton University, proposes to develop an Equilibrated Micromachined Pressure (EMP) sensor for measuring hypersonic transients with amplitudes 16 MHz) bandwidth in blast simulation environments, but these sensors are not sensitive below 1 bar.Therefore, RSI will use thin silicon nitride membranes, and equilibrate the pressure in the optical cavity to the static pressure in the test section to survive startup of the test facility. This will provide high sensitivity to fast transients, andfilter out low frequency fluctuations. RSI will use its experience in silicon nitride membranes and MEMS pressure sensors, and Princeton University will provide expertise in hypersonic flows and optical diagnostics. Phase I will involve design,fabrication, and test of the EMP sensors to demonstrate sensitivity, ruggedness, and bandwidth. Several companies already market less rugged, lower bandwidth fiber optic pressure sensors. These commercialized sensors are used in applications rangingfrom industrial processing and medical diagnostics to high-speed shock testing in chemical explosions. It is expected that the newly developed EMP sensors will compete aggressively in these existing markets as well as the hypersonic test applications thatare the primary focus of this effort. Development of EMP sensors will address a critical need in hypersonic vehicle development, as well as improve pressure sensing capabilities in manufacturing, research, and medical applications.