SBIR/STTR Research Award
LARGE AREA NON-CONTAMINATING HIGH FLUX ATOMIC HYDROGEN SOURCE
Award amount
$59,558Program and phase
SBIR · Phase IAward year
1994Award details
- Awarding agency
- Department of Defense
- Branch
- Missile Defense Agency
- Recipient company
- IONWERKS INC
- Proposal award date
- Not reported
- Contract end date
- Not reported
- UEI
- XFHSJJLN7ZQ7
- Solicitation number
- Not reported
- Topic code
- Not reported
Research abstract
A new approach to generating atomic hydrogen (and possibly N and O) will give atomic fluxes of 10(-19) atoms/cm(-2) over a three inch wafer positioned three inches in front of the source. Scalt up to larger areas may be possible in phase II. We will examine the use of this source as an alternative to hot filament assisted generation of atomic H for diamond thin film growth. Use of the source for MBE epitaxy especially in Si/Ge systems may be possible particularly if metallic contamination of the film by the source is successfully minimized.
Technology keywords
Not reported
Other awards by this recipient
Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.
- Nanoparticulate Coatings Enhance Ion Detection
- Diode lasers and Small Nanoparticulate Matrices Combine to Elevate Sensitivity of MILDI-MSI
- Miniature Recoil Ion Mass Spectrometer enables correlative elemental isotopic and backscatter analysis from solid nanovolumes
- Nanoparticulate Coatings Enhance Ion Detection
- Gas Phase Synthesis and Implantation of Metastable Intermolecular Compounds (MICs)
Research funding history
65 SBIR/STTR records share this UEI (1986–2021). Reported award amounts total $17,405,049. Reported amounts are not federal obligations.
Phases: Phase I, Phase II
Agencies: Department of Health and Human Services, Department of Defense, National Aeronautics and Space Administration, Department of Energy, National Science Foundation