Disposable MEMS Single-Chip Chemical and Biological Sensor

We propose to develop and demonstrate an innovative, real-time sensor technology capable of detecting and identifying a variety of chemicals and biologicals. Our goal is to develop a recently demonstrated photothermal micro-spectroscopy technique into asingle chip architecture. The technique has previously been successful for demonstrations on a bench-top scale in detecting various chemicals (chem warfare simulants, explosives, etc) and very recently in the detection of biologicals (anthrax simulantbacterial spores and DNA bases). There are no insurmountable fundamental principal or technological hurdle in miniaturizing this technique to the chip scale. In fact some aspect of the approach will actually be enhanced at these scales. In thisapproach we use microcantilever thermal detectors that has a detection sensitivity of ~10-15 J for heat energy. This unprecedented sensitivity can be utilized to detect the presence of target species with a very high sensitivity and selectivity. Thusthe source, thermal detector array, IR waveguide and associated readout and signal processing electronics will all be collocated on the same chip. This approach can produce an extremely low cost (disposable) sensor if produces in large quantities that ishighly capable since it is modeled on a recently developed laboratory instrument. Military and commercial employment of rapid chemical and biological sensing has distinct advantages over conventional technology in terms of speed, size, performance andcost. There are numerous application were the fast detection times are desirable. The development of efficient, reliable and cost effective devices will enhance DOD mission capability and have vast commercial spin-offs.