SBIR Phase I: Scanning Electron Microscope Micro-Force Testing System (SEM/MFTS)

This Small Business Innovation Research Phase I project will develop a Micro-Force Test Apparatus inside a Scanning Electron Microscope to better learn the micromechanical properties of materials and MEMS devices. The project will explore mechanical properties of MEMS devices as well as individual phases in metals. The properties to be explored are compressive strength, shear strength, tensile strength, flex, and peel. In addition, microgrippers will be added to the end of the linear motion feed though. This addition will allow for assembly of other components using various attachment techniques including thermoset polymer adhesives, solders and brazes. The potential commercial application for the Microforce Testing System and fixtures will be to characterize materials such as metals and ceramics and MEMS-type devices.