Micromachined Silicon, Large Area X-Ray Detector

60589 The U.S. Department of Energy (DOE) is seeking new approaches that can advance measurements in nuclear physics. Innovative, large area, highly sensitive radiation detectors, with improved spatial and temporal resolution, would significantly improve upon the experimental technique used by national laboratories and universities in experiments with accelerators and other sources of high energy beams. This project will develop fabrication technology for micromachined silicon x-ray detectors, utilizing the benefits of conventional semiconductor technologies that allow for inexpensive processing of wafers with large diameters. In Phase I, a proof-of- concept experimental demonstration of the major components of the proposed technology was conducted. In Phase II, the technology will be applied to the fabrication of the large area x-ray detector with improved performance characteristics. The developed prototype will be tested at the Argonne National Laboratory. Commercial Applications and Other Benefits as described by the awardee: In addition to the direct application in nuclear experiments conducted by the national laboratories and universities, the Large Area Silicon Microchannel X-Ray detector should find a wide area of applications in space exploration, medicine, biology, and biochemical research.