High Temperature SiC MEMS Infrared Emitters

There is a need for infrared scene generators with much larger dynamic range and apparent temperature than currently available to accurately simulate high end targets like jet engine exhaust, missile plumes during boost phase, fuel explosions and infraredcountermeasures (flares). Current scene generators based on silicon resistor arrays are limited to about 650,aC. We are proposing a 2-part solution to achieve higher apparent target temperatures (up to 2500,aC). We propose to demonstrate hightemperature emitters (up to 1200,aC) based on SiC rather than silicon. Further, we will adapt our expertise in photonic crystal technology to control infrared emissivity as a function of wavelength in order to increase the apparent radiometric temperatureof the emitters to ~2500,aC.Ion Optics is the emerging technology and product leader in infrared MEMS gas sensors. We have developed patented optical platform technology for controlling (tuning) the infrared emission and absorption wavelengths of a silicon surface. We have usedthis technology to create small, accurate, reliable, low power, and low-cost infrared gas sensors to detect toxic and combustible gases in homes, automobiles, public buildings and the work environment. In phase 1, we will use this SensorChip, technologyto demonstrate emissivity-controlled, apparently high temperature (>2000,aC) emission from SiC test structures. In phase 2, we will demonstrate SiC emitter arrays suitable for use in high dynamic range scene projectors. The military benefits of IR scene generators with improved dynamic range include: permits more realistic evaluation of advanced (complex) infrared automatic target recognition (ATR) algorithms and signal processing concepts; enables more realisticsimulations of IR countermeasures to help develop more robust tracking algorithms; and it enables more realistic simulation of aerothermal heating of seeker windows. As importantly, the ability to more realistically represent IR scenes will improvereliability of seeker calibration and reduce testing costs by reducing the need for flight tests.