Parallel Data Collection Wavelength Dispersive X-ray Spectrometer for Scanning Electron Microscopy

This project will develop parallel data collection technology for scanning electron microscopes, used for materials science studies at DOE facilities. The new Wavelength Dispersive X-ray Spectrometer (WDS) will simultaneously scan and show the entire spectral interval it covers, rather than the slow serial scan of a conventional WDS. This parallel scanning WDS will closely resemble an Energy Dispersive Spectrometer (EDS) in the appearance of data but will have the energy resolution of WDS. Such a spectrometer will enable very fast decision making by the user, who will not have to wait for an entire serial-type WDS scan.