SBIR/STTR Research Award
COMPACT, QUASI-CW ARF LASERS FOR PHOTOLITHOGRAPHY
Award amount
$49,626Program and phase
SBIR · Phase IAward year
1991Award details
- Awarding agency
- Department of Defense
- Branch
- Defense Advanced Research Projects Agency
- Recipient company
- Potomac Photonics, Inc.
- Proposal award date
- Not reported
- Contract end date
- Not reported
- UEI
- Y8PAXKMS1UX9
- Solicitation number
- Not reported
- Topic code
- Not reported
Research abstract
A SMALL HIGH-REPETITION-RATE ARF LASER UTILIZING MICROWAVE DISCHARGE EXCITATION WILL BE CONSTRUCTED FOR INTERFEROMETRY AND MASTER OSCILLATOR APPLICATIONS IN PHOTOLITHOGRAPHY. THE LASER WILL EXHIBIT A SPECTRAL WIDTH OF APPROXIMATELY 2 PICOMETERS AND IS EXPECTED TO OPERATE IN A LOW-ORDER TRANSVERSE MODE. IT SHOULD BE CAPABLE OF PULSE REPETITION RATES IN EXCESS OF ONE KILOHERTZ. THE PROPOSED LOW-ORDER TRANSVERSE MODE WOULD FIND APPLICATIONS IN INJECTION CONTROL OF LARGER ARF LASERS AND IN UV RAMAN SPECTROSCOPY. IN ADDITION, MANY APPLICATIONS EXIST IN MICROFABRICATION AND CHEMICAL ANALYSIS FOR A FAR ULTRAVIOLET SOURCE WHICH IS COMPACT, WITH REDUCED MAINTENANCE REQUIREMENTS.
Technology keywords
Not reported
Other awards by this recipient
Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.
- SBIR Phase II: Energy Storage, Electrical Distribution, and Packaging for Wireless Sensor Networks
- SBIR Phase I: Energy Storage, Electrical Distribution, and Packaging for Wireless Sensor Networks
- SBIR Phase I: A Novel Manufacturing Method for Conformal, Embedded Electronics and Sensor Systems: Combining Thermal Spray with Laser Micromachining
- Uv Laser Micromachining And Replication For The Low Cost Production Of Micromechanical Components
- Laser Micromachining for Rapid Manufacture of Diffraction Optical Components
Research funding history
20 SBIR/STTR records share this UEI (1983–2011). Reported award amounts total $3,918,788. Reported amounts are not federal obligations.
Phases: Phase I, Phase II
Agencies: Department of Defense, National Science Foundation, National Aeronautics and Space Administration, Department of Health and Human Services