Robust Nanopopous Ceramic Microsensor Platform

This proposal seeks NIST support for the development of a robust gas microsensor platform from nanoporous alumina ceramic. Conventional microsensors have limited application in harsh conditions, such as in the exhaust streams, due to their low stability at temperatures above 500¿C. Furthermore, this also limits implementation of sensors that require high temperature for their operation. We propose a concept that has a potential to overcome these limitations and provide a microplatform for sensing in harsh conditions. Our innovation combines nano- and microfabrication with self-organized nanostructured ceramic to create low power, high surface area, fast response, robust microsensors. Using this approach, we have already demonstrated several types of microsensors. This Phase 1 project now targets comprehensive development of this ceramic microplatform in support of chemically and mechanically robust microsensors for applications that demand reliability in extended operation and could be heated in excess of 800¿C.